學術活動
學術報告：Optical scanning micro-mirrors fabricated from atomic-layer deposited alumina and silicon
2025-05-13
點擊次數：時間：2025年05月13日下午15:00
地點：校本部教三樓307會議室
主講人：羽根一博 (Kazuhiro Hane) 教授
主講人簡介：Professor Kazuhiro Hane received the B.S., M.S., and Ph.D. degrees in electronics from Nagoya University in 1978, 1980, and 1983, respectively. He studied positive column Cd ion lasers for his Ph.D. degree. From 1983 to 1990, he was an Assistant Professor in electrical-mechanical engineering with Nagoya University. From 1985 to 1986, he was a Visiting Researcher in physics with the National Research Council Canada. From 1990 to 1994, he was an Associate Professor in electronics with Nagoya University. He engaged in the research and development of optical sensing techniques, micro-lithography, and opt-mechanical systems. Since 1994, he has been a professor in mechanical engineering with Tohoku University, where he has been involved in the research and development of optical microsensors and optical MEMS. Since 2021, he has been with the New Industry Creation Center, Tohoku University.
主講內容簡介：Micro-electro-mechanical systems (MEMS) technology is now widely spreading to many areas such as consumer electronics, industrial applications, and scientific research. On the other hand, atomic-layer deposited (ALD) thin films are attractive to micro-fabrications because of the atomically-thin and atomically-flat uniform films. We applied the technology of alumina ALD thin film to generate three-dimensional (3D) micro-structures. 3D structures of alumina such as trusses and fins are generated using silicon-mold technology and sacrificial silicon etching. The fabricated 3D structures are used for a scanning micro-mirror. The micro-mirror has a light-weight to enhance the performance of laser scanning. Moreover, the rotation springs of a scanning micro-mirror is coated with a few nanometers ALD alumina film to extend the fracture life-time. The characteristics and limits of micro-mirrors are discussed for scanning laser displays.
